Embeddable Low-voltage Micropump Using Electroosmosis of the Second Kind
نویسندگان
چکیده
A low-voltage micropump with no moving parts and based on standard MEMS fabrication techniques has been developed. The pump has been characterized by pumping a variety of liquids, including de-ionized water, phosphate buffer saline, and aqueous solutions of sugars and alcohols as well as pure methanol, with typical pumping speeds of a few hundred micrometer per second. The small power/voltage requirements and dimensions make the pump suitable for portable, embedded and implantable devices. The pump is situated inside the flow channel and can therefore be directly integrated in high-density microfluidic networks.
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